Mokhoa oa ho qhibilihisa le ho hloekisa oa 6N Ultra-High-Purity Sulfur ka Liparamente tse qaqileng

Tlhahiso ea sebabole sa 6N (≥99.9999% bohloeki) se nang le bohloeki bo phahameng haholo se hloka ho qhibilihisoa ha mekhahlelo e mengata, ho monya ho tebileng, le ho sefa ho hloekileng haholo ho felisa litšepe tse sa reng letho, litšila tsa tlhaho le likaroloana. Ka tlase ke ts'ebetso ea indasteri e kopanyang ho qhibilihisoa ha vacuum, tlhoekiso e thusoang ke microwave, le mahlale a nepahetseng a kamora kalafo.

I. Phekolo ea Pele ho Lintho Tse Tala le ho Tlosa Litšila

‌1. Khetho ea Lintho tse Tala le Phekolo ea Pele ho Nako

• ‌Litlhoko‌: Bohloeki ba sebabole ba pele ≥99.9% (sehlopha sa 3N), litšila tsohle tsa tšepe ≤500 ppm, dikahare tsa khabone ya tlhaho ≤0.1%.
• ‌Ho qhibiliha ho thuswang ke microwave:
  Sebabole se tala se sebetsoa ka har'a reactor ea microwave (maqhubu a 2.45 GHz, matla a 10-15 kW) ho 140-150°C. Potoloho ea dipole e bakoang ke microwave e netefatsa ho qhibiliha ka potlako ha e ntse e bolisa litšila tsa tlhaho (mohlala, metsoako ea sekontiri). Nako ea ho qhibiliha: metsotso e 30-45; botebo ba ho kenella ha microwave: 10-15 cm
• ‌Ho Hlatsoa ka Metsi a Hloekileng:
  Sebabole se qhibilihisitsoeng se kopanngoa le metsi a hloekisitsoeng (resistivity ≥18 MΩ·cm) ka karolelano ea boima ba 1:0.3 ka har'a reactor e hlohlellelitsoeng (120°C, khatello ea 2 bar) ka hora e le 'ngoe ho tlosa letsoai le qhibilihang ka metsing (mohlala, ammonium sulfate, sodium chloride). Karolo ea metsi e tlosoa 'me e sebelisoa hape ka lipotoloho tse 2-3 ho fihlela conductivity e fihla ≤5 μS/cm.

‌2. Adsorption le Filtration tsa Mehato e Mengata

• ‌Diatomaceous Earth/Khabone e Kentsweng Mosebetsing:
  Lefats'e la diatomaceous (0.5–1%) le khabone e sebetsang (0.2–0.5%) li eketsoa ho sebabole se qhibilihisitsoeng tlas'a tšireletso ea naetrojene (130°C, ho hlohlelletsa lihora tse 2) ho monya metsoako ea tšepe le lintho tse setseng tsa tlhaho.
• ‌Ho Hloekisa ka ho Nepahala ho Fetisisa:
  Ho sefa ka mekhahlelo e 'meli ho sebelisoa li-filter tse sintered titanium (boholo ba li-pore tsa 0.1 μm) ka khatello ea sistimi ea ≤0.5 MPa. Palo ea likaroloana ka mor'a ho sefa: ≤10 likaroloana/L (boholo >0.5 μm).

II. Mokhoa oa ho Hlatsoa ka Vacuum oa Mehato e Mengata

‌1. Ho qhala ha pele (Tlosa Litšila tsa Tšepe)‌

• ‌Lisebelisoa‌: Kholomo ea ho qhibilihisa ea quartz e hloekileng haholo e nang le sephutheloana se hlophisitsoeng sa tšepe e sa hloekang sa 316L (≥lipoleiti tsa khopolo-taba tse 15), vacuum ≤1 kPa.
• ‌Liparamente tsa Ts'ebetso:
• ‌Mocheso oa Phepo‌: 250–280°C (sebabole se bela ka mocheso wa 444.6°C tlasa kgatello e tikolohong; vacuum e fokotsa ntlha ya ho bela ho 260–300°C).
• ‌Karolelano ea Reflux‌: 5:1–8:1; phetoho ea mocheso o kaholimo ho kholomo ≤±0.5°C.
• ‌Sehlahisoa‌: Bohloeki ba sebabole bo kopantseng ≥99.99% (sehlopha sa 4N), litšila tsohle tsa tšepe (Fe, Cu, Ni) ≤1 ppm.

‌2. Ho Hlatsoa ha Limolek'hule tsa Bobeli (Ho Tlosoa ha Litšila tsa Organic)‌

• ‌Lisebelisoa‌: Sesebelisoa sa ho hloekisa limolek'hule se nang le lekhalo la mouoane le ho kolobisa la 10-20 mm, mocheso oa mouoane 300-320°C, vacuum ≤0.1 Pa.
• ‌Karohano ea Litšila:
  Lintho tse phelang tse belang hanyane (mohlala, thioethers, thiophene) lia fufuleloa ebe lia ntšoa, ha litšila tse belang haholo (mohlala, polyaromatics) li sala masala ka lebaka la liphapang tseleng e lokolohileng ea limolek'hule.
• ‌Sehlahisoa‌: Bohloeki ba sebabole ≥99.999% (sehlopha sa 5N), khabone ea tlhaho ≤0.001%, sekhahla sa masala <0.3%.

‌3. Ho Hloekisa Sebaka sa Thuto e Phahameng (Ho Finyella Bohloeki ba 6N)‌

• ‌Lisebelisoa‌: Sehlahisoa sa libaka se otlolohileng se nang le taolo ea mocheso oa libaka tse ngata (± 0.1°C), lebelo la ho tsamaea la libaka ke 1–3 mm/h.
• ‌Karohano:
  Ho sebelisa li-coefficient tsa karohano (K=Csolid/CliquidK=Ctiileng​/Cmokelikeli​), sebaka sa 20–30 se fetisa litšepe tse tiileng (As, Sb) qetellong ea ingot. 10–15% ea ho qetela ea ingot ea sebabole ea lahloa.

III. Kamora Kalafo le ho Hloekisa Haholo

‌1. Ho Ntša Solvent e Hloekileng ka ho Fetisisa

• ‌Ho Ntša Tetrachloride ea Ether/Carbon:
  Sebabole se kopanngoa le ether ea sehlopha sa chromatographic (karolelano ea bophahamo ba 1:0.5) tlas'a thuso ea ultrasonic (40 kHz, 40°C) metsotso e 30 ho tlosa lintho tse phelang tse nyenyane tsa polar.
• ‌Pholiso ea Solvent:
  Ho monya ha sefe ea limolek'hule le ho qhala ha vacuum ho fokotsa masala a solvent ho ≤0.1 ppm.

‌2. Phapanyetsano ea Ultrafiltration le Ion

• ‌PTFE Membrane Ultrafiltration:
  Sebabole se qhibilihisitsoeng se sefshoa ka har'a lera la PTFE la 0.02 μm ka khatello ea 160–180°C le ≤0.2 MPa.
• ‌Li-resin tsa Phapanyetsano ea Ion:
  Li-resin tsa Chelating (mohlala, Amberlite IRC-748) li tlosa li-ion tsa tšepe tse boemong ba ppb (Cu²⁺, Fe³⁺) ka sekhahla sa phallo ea 1–2 BV/h.

‌3. Ho theha Tikoloho e Hloekileng Haholo

• ‌Atomization ea Khase e sa sebetseng:
  Ka phapusing e hlwekileng ea Sehlopha sa 10, sebabole se qhibilihisitsoeng se athomolloa ka naetrojene (khatello ea 0.8–1.2 MPa) ho ea ho li-granule tse chitja tsa 0.5–1 mm (mongobo <0.001%).
• ‌Sephutheloana sa Vacuum:
  Sehlahisoa sa ho qetela se kwalwa ka vacuum ka filimi ya aluminium e kopaneng tlasa argon e hlwekileng haholo (bohloeki ba ≥99.9999%) ho thibela oxidation.

‌IV. Liparamente tsa Ts'ebetso ea Bohlokoa‌

‌V. Taolo le Teko ea Boleng

1. ‌Tlhahlobo ea ho Latela Litšila:

• ‌GD-MS (Glow Discharge Mass Spectrometry)‌: E fumana litšepe ho ≤0.01 ppb.
• ‌Sehlahlobi sa TOC‌: E lekanya khabone ea tlhaho ≤0.001 ppm.

1. ‌Taolo ea Boholo ba Likaroloana:
   Ho fapoha ha laser (Mastersizer 3000) ho netefatsa ho kheloha ha D50 ≤±0.05 mm.
2. ‌Bohloeki ba Holimo:
   XPS (X-ray Photoelectron Spectroscopy) e tiisa botenya ba oxide ea bokaholimo ≤1 nm.

VI. Moralo oa Polokeho le Tikoloho

1. ‌Thibelo ea ho phatloha:
   Lisebelisoa tsa ho lemoha malakabe a infrared le litsamaiso tsa likhohola tsa naetrojene li boloka maemo a oksijene <3%
2. ‌Taolo ea ho Hlahisa Mosi:

• ‌Likhase tsa Asiti‌: Ho hlatswa NaOH ka mekhahlelo e mmedi (20% + 10%) ho tlosa ≥99.9% H₂S/SO₂.
• ‌Li-VOC‌: Rotor ea Zeolite + RTO (850°C) e fokotsa li-hydrocarbon tse seng tsa methane ho ≤10 mg/m³.

1. ‌Ho Sebelisa Litšila Hape:
   Phokotso ea mocheso o phahameng (1200°C) e khutlisa litšepe; masalla a sebabole a ka tlase ho 0.1%.

VII. Litekanyo tsa Theknoloji le Moruo

• ‌Tšebeliso ea Matla‌: Motlakase oa 800–1200 kWh le mouoane oa lithane tse 2–3 ka tonne ea sebabole sa 6N.
• ‌Khefutsa‌: Ho hlaphoheloa ha sebabole ≥85%, sekhahla sa masala <1.5%.
• ‌LitšenyeheloLitšenyehelo tsa tlhahiso ~120,000–180,000 CNY/ton; theko ea 'maraka 250,000–350,000 CNY/ton (sehlopha sa semiconductor).

Ts'ebetso ena e hlahisa sebabole sa 6N bakeng sa li-photoresist tsa semiconductor, li-substrate tsa metsoako ea III-V, le lits'ebetso tse ling tse tsoetseng pele. Tlhokomelo ea nako ea sebele (mohlala, tlhahlobo ea likarolo tsa LIBS) le tekanyo ea kamore ea ho hloekisa ea ISO Class 1 li netefatsa boleng bo tsitsitseng.

Mengolo e ka tlase

1. Tshupiso ya 2: Maemo a ho Hloekisa Sebabole sa Diindasteri
2. Tshupiso ya 3: Mekhoa e Tswetseng Pele ya ho Sefa Boenjiniere ba Dikhemikhale
3. Tshupiso ya 6: Buka ya Tsamaiso ya Disebediswa tse Hloekileng Haholo
4. Tshupiso ya 8: Diprothokhole tsa Tlhahiso ya Dikhemikhale tsa Sehlopha sa Semiconductor
5. Tshupiso ya 5: Ntlafatso ya ho Hlatswa ka Vacuum